AlliedVision Application semiconductor inspection

Semiconductor Inspection Cameras For Advanced Wafer Surface Analysis

Detect Defects Precisely For Consistent, High-Quality Semiconductor Output

Achieve superior semiconductor quality with industrial cameras designed for precise inspection. Enhance defect detection and process reliability in production.

Challenges & Trends

Semicon, Electronics & Display inspection

Detecting Tiny Defects Across Every Wafer, Every Time

Small defects can escalate into major yield losses. Detecting them across large wafers demands both speed and high-resolution imaging, covering every corner without compromise.

Maintaining High Speed Without Missing A Single Defect

Complete surface inspection must keep pace with tight cycle times. Slower scanning risks production bottlenecks and reduced throughput, making speed and efficiency critical at every stage.

Adapting Illumination To Different Defect Types And Surfaces

Each defect type and surface presents unique visibility challenges. Ensuring sufficient light intensity for high-speed scanning is critical to avoid missed defects and compromised yields.

Applications

Bare Wafer Inspection

Inspection of unprocessed wafers to detect particles, surface scratches or contamination before any structuring begins.

Macro Defect Detection

Detection of large-area defects such as coating irregularities, bad contacts, bridging, or missing structures.

Etch Process Monitoring

Inspection after the etching step to identify residues, corrosion, pinholes, or pattern defects.

Outgoing Quality Control (OQC)

Final visual check before wafers leave the fab – ensures cleanliness, coating integrity, and surface quality.

Circuit Trace Verification

Inspection of PCB traces and patterns to detect breaks, shorts, or deviations from design specifications.

Technical Requirements

High spatial resolution imaging for reliable defect detection in wafer or semiconductor production
SWIR sentitive cameras seeing through all layers with the highest levels of accuracy
High bandwidth for semiconductor inspection requiring high-definition imaging
State-of-the art sensors running at high frame rates for increasing production throughput